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High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform

Sharma, Sarveshwar orcid logoORCID: 0000-0002-0642-0247, Sirse, Nishant orcid logoORCID: 0000-0002-7063-4100 and Turner, Miles M. orcid logoORCID: 0000-0001-9713-6198 (2020) High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform. Plasma Sources Science and Technology, 29 (11). ISSN 0963-0252

Abstract
A particle-in-cell (PIC) simulation study is performed to investigate the discharge asymmetry, higher harmonic generations and electron heating mechanism in a low pressure capacitively coupled plasma (CCP) excited by a saw-tooth like current waveform for different driving frequencies; 13.56 MHz, 27.12 MHz, and 54.24 MHz. Two current densities, 50 A/m2 and 100 A/m2 are chosen for a constant gas pressure of 5 mTorr in argon plasma. At a lower driving frequency, high frequency modulations on the instantaneous sheath electric field near to the grounded electrode are observed. These high frequency oscillations create multiple ionization beam like structures near to the sheath edge that drives the plasma density in the discharge and responsible for discharge/ionization asymmetry at lower driving frequency. Conversely, the electrode voltage shows higher harmonics generation at higher driving frequencies and corresponding electric field transients are observed into the bulk plasma. At lower driving frequency, the electron heating is maximum near to the sheath edge followed by electron cooling within plasma bulk, however, alternate heating and cooling i.e. burst like structures are obtained at higher driving frequencies. These results suggest that electron heating in these discharges will not be described accurately by simple analytical models.
Metadata
Item Type:Article (Published)
Refereed:Yes
Additional Information:Article number: 114001
Subjects:Physical Sciences > Plasmas
DCU Faculties and Centres:DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences
Research Initiatives and Centres > National Centre for Plasma Science and Technology (NCPST)
Publisher:Institute of Physics
Official URL:https://doi.org/10.1088/1361-6595/abbac2
Copyright Information:© 2020 IOP Publishing Ltd
Use License:This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License
Funders:Science Foundation Ireland
ID Code:27112
Deposited On:10 May 2022 11:36 by Miles Turner . Last Modified 10 May 2022 11:36
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