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Influence of select discharge parameters on electric field transients triggered in collisionless very high frequency capacitive discharges

Sharma, Sarveshwar orcid logoORCID: 0000-0002-0642-0247, Sirse, Nishant orcid logoORCID: 0000-0002-7063-4100, Sen, Abhijit, Turner, Miles M. orcid logoORCID: 0000-0001-9713-6198 and Ellingboe, Albert R. orcid logoORCID: 0000-0002-3997-0392 (2019) Influence of select discharge parameters on electric field transients triggered in collisionless very high frequency capacitive discharges. Physics of Plasmas, 26 (10). ISSN 1070-664X

Abstract
Self-consistent particle-in-cell simulations are carried out to investigate the effect of discharge voltage, driving frequency and extent of electrode gap on the formation of electric field transients. The shape of the electron energy distribution function (EEDF) into the bulk plasma and the nature of the mode transition in plasma den- sity is presented for driving frequency range from 27.12 MHz to 80 MHz. The present results, taken in conjunction with our previous study1 [Physics of plasmas 23, 110701 (2016)] that only looked at the driving frequency dependence in collisionless capaci- tive Ar discharges, provide a comprehensive and detailed account of the dynamics of such discharges over a multi-parameter operational space.
Metadata
Item Type:Article (Published)
Refereed:Yes
Additional Information:Article number: 103508
Uncontrolled Keywords:collisionless; capacitive discharges; very high frequency; electric field transients; particle-in-cel
Subjects:Physical Sciences > Plasmas
DCU Faculties and Centres:DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences
Research Initiatives and Centres > National Centre for Plasma Science and Technology (NCPST)
Publisher:American Institute of Physics
Official URL:https://dx.doi.org/10.1063/1.5122837
Copyright Information:© 2019 American Institute of Physics
Use License:This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License
Funders:Science Foundation Ireland
ID Code:27111
Deposited On:10 May 2022 09:48 by Miles Turner . Last Modified 10 May 2022 09:48
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