Sharma, Sarveshwar ORCID: 0000-0002-0642-0247, Sen, Abhijit, Sirse, Nishant ORCID: 0000-0002-7063-4100, Turner, Miles M. ORCID: 0000-0001-9713-6198 and Ellingboe, Albert R. ORCID: 0000-0002-3997-0392 (2018) Plasma density and ion energy control via driving frequency and applied voltage in a collisionless capacitively coupled plasma discharge. Physics of Plasmas, 25 (8). ISSN 1070-664X
Abstract
The dynamical characteristics of a single frequency low pressure capacitively coupled plasma (CCP) device
under varying applied RF voltages and driving frequencies are studied using particle-in-cell/Monte Carlo
collision simulations. An operational regime is identified where for a given voltage the plasma density is
found to remain constant over a range of driving frequencies and to then increase rapidly as a function of
the driving frequency. The threshold frequency for this mode transition as well as the value of the constant
density is found to increase with an increase in the applied voltage. Over the constant density range, for a
given voltage, the sheath width is seen to increase as a function of the increasing driving frequency, thereby
changing the ion energy without affecting the ion density. Our parametric study thus indicates that the twin
knobs of the applied voltage and driving frequency offer a means of independently controlling the density and
the ion energy in a low pressure CCP device that may be usefully exploited for plasma processing applications.
Metadata
Item Type: | Article (Published) |
---|---|
Refereed: | Yes |
Additional Information: | Article number: 080705 |
Subjects: | Physical Sciences > Plasmas |
DCU Faculties and Centres: | DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences Research Initiatives and Centres > National Centre for Plasma Science and Technology (NCPST) |
Publisher: | American Institute of Physics |
Official URL: | https://dx.doi.org/10.1063/1.5045816 |
Copyright Information: | © 2018 Authors. |
Use License: | This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License |
Funders: | Science Foundation Ireland |
ID Code: | 27110 |
Deposited On: | 09 May 2022 15:54 by Miles Turner . Last Modified 05 Oct 2022 15:37 |
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