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Analysing trimethylaluminum infiltration intopolymer brushes using a scalable area selectivevapor phase process

Snelgrove, Matthew orcid logoORCID: 0000-0003-0344-1146, McFeely, Caitlin orcid logoORCID: 0000-0002-0447-8250, Shiel, Kyle, Hughes, Greg orcid logoORCID: 0000-0003-1310-8961, Yadav, Pravind orcid logoORCID: 0000-0002-2535-7132, Weiland, C., Woicik, J.C., Mani-González, Pierre Giovanni orcid logoORCID: 0000-0001-6993-2349, Lundy, Ross orcid logoORCID: 0000-0002-1329-8614, Morris, Michael A. orcid logoORCID: 0000-0001-8756-4068, McGlynn, Enda orcid logoORCID: 0000-0002-3412-9035 and O'Connor, Robert orcid logoORCID: 0000-0001-5794-6188 (2021) Analysing trimethylaluminum infiltration intopolymer brushes using a scalable area selectivevapor phase process. Materials Advances, 2 . pp. 769-781. ISSN 2633-5409

Abstract
Developing vapor phase infiltration (VPI) processes for area selective polymer nanopatterning requires substantial advancement in understanding precursor infiltration, precursor–polymer interaction and process parameters. In this work, infiltration receptive poly(2-vinylpyridine) (P2VP) and poly(4-vinylpyridine) (P4VP) brushes were exposed to a trimethylaluminum (TMA) VPI process and compared toa non-receptive polystyrene (PS) system. The interaction that takes place between TMA and P2VP/P4VPwas analysed in detail and we report on notable advantages in the use of P4VP, arising from the difference in position of the pyridinic nitrogen. The VPI process was performed in a commercial atomic layer deposition reactor and the effects of the fundamental process parameters on the three polymer brushes were investigated to ensure optimal area selectivity. In situX-ray photoelectron spectroscopy (XPS) measurements were supported by grazing angle Fourier transform infrared spectroscopy (GA-FTIR)and hard X-ray photoelectron spectroscopy (HAXPES). The report identifies several important factors when developing a VPI process to ensure area selectivity, while also demonstrating the use of novel pyridine containing polymers for VPI area selective purposes.
Metadata
Item Type:Article (Published)
Refereed:Yes
Uncontrolled Keywords:Polymer; brush; trimethylaluminum
Subjects:Engineering > Materials
Engineering > Microelectronics
Physical Sciences > Nanotechnology
Physical Sciences > Semiconductors
Physical Sciences > Spectrum analysis
DCU Faculties and Centres:DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences
Research Initiatives and Centres > National Centre for Plasma Science and Technology (NCPST)
Publisher:Royal Society of Chemisty
Official URL:https://dx.doi.org/ 10.1039/d0ma00928h
Copyright Information:© 2021 The Authors. Open Access
Use License:This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License
Funders:Science Foundation Ireland (SFI) under Grant No. 12/RC/2278 and 16/SP/3809
ID Code:25772
Deposited On:19 Apr 2021 13:42 by Enda Mcglynn . Last Modified 28 Nov 2023 12:05
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