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Remote sensing of a low pressure plasma in the radio near field

Kelly, Seán orcid logoORCID: 0000-0002-8782-9633 and McNally, Patrick J. orcid logoORCID: 0000-0003-2798-5121 (2017) Remote sensing of a low pressure plasma in the radio near field. Applied Physics Express, 10 (9). 096101. ISSN 1882-0778

Abstract
A novel approach to remotely monitor low pressure non-equilibrium plasmas is reported. A magnetic field antenna is positioned in the near field of a capacitively coupled plasma. Magnetic flux from plasma currents, present near the viewport, is intercepted via a calibrated loop antenna placed outside the chamber. The induced signal current is correlated to bulk plasma currents. Comparison of relative harmonic amplitudes show resonance features for lower operating pressures. The geometric resonance and electron-neutral collision frequencies are evaluated from resonant harmonic features. Of particular interest to industrial scenarios, this approach advances remote, non invasive and installation free plasma monitoring.
Metadata
Item Type:Article (Published)
Refereed:Yes
Subjects:Physical Sciences > Spectrum analysis
Physical Sciences > Plasma processing
Engineering > Electronic engineering
Engineering > Microelectronics
DCU Faculties and Centres:DCU Faculties and Schools > Faculty of Engineering and Computing > School of Electronic Engineering
Research Initiatives and Centres > Advanced Processing Technology Research Centre (APTRC)
Research Initiatives and Centres > National Centre for Plasma Science and Technology (NCPST)
Publisher:Japan Society of Applied Physics
Official URL:https://doi.org/10.7567/APEX.10.096101
Copyright Information:© 2017 The Japan Society of Applied Physics
Use License:This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License
Funders:Enterprise Ireland grant no. CF2014-4300.
ID Code:21979
Deposited On:06 Sep 2017 10:29 by Patrick Mcnally . Last Modified 24 Jan 2019 10:24
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