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Control of ZnO nanowire arrays by nanosphere lithography (NSL) on laser-produced ZnO substrates

Garry, Seamus, McCarthy, Éanna, Mosnier, Jean-Paul orcid logoORCID: 0000-0002-9312-1754 and McGlynn, Enda orcid logoORCID: 0000-0002-3412-9035 (2011) Control of ZnO nanowire arrays by nanosphere lithography (NSL) on laser-produced ZnO substrates. Applied Surface Science, 257 (12). pp. 5159-5162. ISSN 0169-4332

Abstract
Nanosphere lithography (NSL) is a successful technique for fabricating highly ordered arrays of ZnO nanowires typically on sapphire and GaN substrates. In this work, we investigate the use of thin ZnO films deposited on Si by pulsed laser deposition (PLD) as the substrate. This has a number of advantages over the alternatives above, including cost and potential scalability of production and it removes any issue of inadvertent n-type doping of nanowires by diffusion from the substrate. We demonstrate ordered arrays of ZnO nanowires, on ZnO-coated substrates by PLD, using a conventional NSL technique with gold as the catalyst. The nanowires were produced by Vapor Phase Transport (VPT) growth in a tube furnace system and grew only on the areas pre-patterned by Au. We have also investigated the growth of ZnO nanowires using ZnO catalyst points deposited by PLD through an NSL mask on a bare silicon substrate.
Metadata
Item Type:Article (Published)
Refereed:Yes
Uncontrolled Keywords:ZnO; Nanostructure; Growth; Nanosphere lithography
Subjects:Physical Sciences > Thin films
Engineering > Materials
Physical Sciences > Nanotechnology
Physical Sciences > Semiconductors
DCU Faculties and Centres:Research Initiatives and Centres > National Centre for Plasma Science and Technology (NCPST)
DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences
Publisher:Elsevier
Official URL:http://dx.doi.org/10.1016/j.apsusc.2010.11.182
Copyright Information:© 2011 Elsevier
Use License:This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License
ID Code:19665
Deposited On:20 Nov 2013 13:59 by Enda Mcglynn . Last Modified 07 Oct 2021 12:20
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