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Jump to: 2021
Number of items: 1.

2021

Harvey, Cleo orcid logoORCID: 0000-0002-3752-4225 (2021) Plasma dynamics of Very-High-Frequency (VHF) discharges with application to Atomic-Layer-Etching (ALE). PhD thesis, Dublin City University.

This list was generated on Sat Feb 22 05:51:47 2025 UTC.